How ASML's EUV Light Source Produces 13.5 nm Light

Commenters repeatedly point to it whenever EUV, ASML or chip manufacturing comes up, as a clear and astonishing explanation of one of the hardest engineering problems in chipmaking.

Asianometry explains the EUV light source inside ASML's lithography machines, where lasers hit falling tin droplets twice to produce 13.5 nm light. It walks through the engineering of the droplet generator, the pre-pulse and main laser, and the plasma that results.